Micro-Electro-Mechanical Systems

MEMS – Micro-Electro-Mechanical Systems

One of the most promising technological developments in the recent decades is the emerging field of MEMS (Micro-Electro-Mechanical Systems). MEMS offer the possibility of reducing entire complex engineering systems to the micro-scale domain.

The integration of electronic circuitry and MEMS sensor/actuator devices results in an unprecedented overall reduction in size and mass beyond the capabilities of any previous technology. Particularly compelling is the low-cost, high-yield, mass-production nature of MEMS fabrication.

Nowadays, MEMS find commercial applications in a great variety of forms of sensors and actuators including simple pressure sensors and accelerometers, gyroscopes, infrared imageres, inkjet print heads, mircromirrors for optical projection displays, DNA analyzers and biochemical sensors as part of “labs on a chip”, micromanipulators in robotics and medicine, and many more.

Our group at MCS-Panamericana focuses on the design of MEMS thermal and electrostatic actuators, micro-sensors, and energy harvesters for micro-power sources. Applications of these developments range from sensors for the automotive and aerospace industry, to micro-manipulators for micro-medicine, micro-biology and micro-robotics.

 

Contact: Jorge Varona and María Teresa Orvañanos